MNMS Lab Rate Details
MNMS Lab Charges & Rates
MNMS Lab Charges | Cost | ||
---|---|---|---|
Description | Academic Users | External Users | |
MNMS Cleanroom Access | $60 / day* | $90 / day | |
Prep Room Access | $20 / day | $30 / day | |
MEL Cleanroom Access | $10 / day | $15 / day | |
Safety** | $10 / month | $15 / month | |
* Maximum Academic charge of $800 / mo ** Not applicable for users of MEL Cleanroom |
MNMS Lab Rates | Cost | ||
---|---|---|---|
Equipment | Academic Users | External Users | |
* Maximum Academic charge of $2,400 ** $15 / minute charge for gold deposition *** $8 / minute up to 200 minutes of use, then $6 / minute thereafter | |||
ICP-DRIE (Plasmatherm) | $1 / minute* | $1.5 / minute | |
ICP-DRIE (STS) | $8 / minute*** | $15 / minute | |
Cluster (3-gun Dielectric Sputterer) | $20 / hour | $30 / hour | |
Cluster (Evaporator | $20 / hour | $30 / hour | |
Cluster (8-gun Metal Sputterer) | $20 / hour** | $30 / hour** | |
MVD | $12 / hour | $18 / hour | |
ICP-PECVD | $20 / hour | $30 / hour | |
Bonder | $3 / hour | $4.5 / hour | |
RIE (Axic) | $5 / hour | $7.5 / hour | |
SEM | $10 / hour | $15 / hour | |
Super Critical (CO2 Dryer) | $2.5 / hour | $3.75 / hour | |
Furnaces (High Temp) | $2 / hour | $3 / hour | |
Furnaces (Tube) | $2 / hour | $3 / hour |
All MNMS Cleanroom Rates are subject to change. Such changes will be reflected on this page as soon as possible, but for exact costs please contact Joe Maduzia.