MechSE Illinois

University of Illinois at Urbana Champaign
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MNMS Lab Rate Details

MNMS Lab Charges & Rates

MNMS Lab ChargesCost
DescriptionAcademic UsersExternal Users
MNMS Cleanroom Access$60 / day*$90 / day
Prep Room Access$20 / day$30 / day
MEL Cleanroom Access$10 / day$15 / day
Safety**$10 / month$15 / month
* Maximum Academic charge of $800 / mo
** Not applicable for users of MEL Cleanroom
MNMS Lab RatesCost
EquipmentAcademic UsersExternal Users
* Maximum Academic charge of $2,400
** $15 / minute charge for gold deposition
*** $8 / minute up to 200 minutes of use, then $6 / minute thereafter
ICP-DRIE (Plasmatherm)$1 / minute*$1.5 / minute
ICP-DRIE (STS)$8 / minute***$15 / minute
Cluster (3-gun Dielectric Sputterer)$20 / hour$30 / hour
Cluster (Evaporator$20 / hour$30 / hour
Cluster (8-gun Metal Sputterer)$20 / hour**$30 / hour**
MVD$12 / hour$18 / hour
ICP-PECVD$20 / hour$30 / hour
Bonder$3 / hour$4.5 / hour
RIE (Axic)$5 / hour$7.5 / hour
SEM$10 / hour$15 / hour
Super Critical (CO2 Dryer)$2.5 / hour$3.75 / hour
Furnaces (High Temp)$2 / hour$3 / hour
Furnaces (Tube)$2 / hour$3 / hour

All MNMS Cleanroom Rates are subject to change. Such changes will be reflected on this page as soon as possible, but for exact costs please contact Joe Maduzia.