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Micro-Nano-Mechanical Systems Cleanroom

Cleanroom Access

In order to gain access to the MNMS Cleanroom facilities you will need to complete the "MNMS Laboratory Access Request Form". Follow the directions on the form and then submit the completed and signed form, your I-Card photocopy and a copy of your DRS General Safety Training Certificate to Joe Maduzia, 221B MEB. If you have any questions on MNMS Cleanroom Intranet Accessibility please contact Joe Maduzia.

The entrance to the MNMS Cleanroom can be found at 213 MEB.

The Micro-Nano-Mechanical Systems Cleanroom Laboratory within the Department of Mechanical Science and Engineering at the University of Illinois provides an opportunity for research and discovery that is otherwise unattainable in a typical laboratory setting. If you have any questions or concerns, please email the MNMS Director (

Description of Facilities

The Micro-Nano Mechanical Systems (MNMS) Laboratory is a 3800 sq. ft suite of labs and related support rooms, including 2 cleanroom laboratories for research in the design and fabrication of small-scale mechanical systems. The lab supports research and instruction in the general area of micro- and nano-electro-mechanical systems (MEMS & NEMS), and nano-chemical-electrical-mechanical-manufacturing systems (Nano-CEMMS). The current focus is on devices employing nano-to-microscale mechanisms and the integration of these mechanisms into meso-scale devices.

The MNMS laboratory has class 100 and 10 cleanrooms for the microfabrication, inspection, and testing of devices. The cleanrooms house a range of state-of-the-art equipment including:

In addition to the cleanroom laboratories, the MNMS laboratory has a preparation room for lapping, dicing, ultrasonic milling, and sample preparation. A chemical fume hood and Scanning Electron Microscope (SEM) are also available.