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Micro-Nano-Mechanical Systems Cleanroom
The Micro-Nano-Mechanical Systems Cleanroom Laboratory within the Department of Mechanical Science and Engineering at the University of Illinois provides an opportunity for research and discovery that is otherwise unattainable in a typical laboratory setting. If you have any questions or concerns, please email the MNMS Director (email@example.com).
Description of Facilities
The Micro-Nano Mechanical Systems (MNMS) Laboratory is a 3800 sq. ft suite of labs and related support rooms, including 2 cleanroom laboratories for research in the design and fabrication of small-scale mechanical systems. The lab supports research and instruction in the general area of micro- and nano-electro-mechanical systems (MEMS & NEMS), and nano-chemical-electrical-mechanical-manufacturing systems (Nano-CEMMS). The current focus is on devices employing nano-to-microscale mechanisms and the integration of these mechanisms into meso-scale devices.
The MNMS laboratory has class 100 and 10 cleanrooms for the microfabrication, inspection, and testing of devices. The cleanrooms house a range of state-of-the-art equipment including:
In addition to the cleanroom laboratories, the MNMS laboratory has a preparation room for lapping, dicing, ultrasonic milling, and sample preparation. A chemical fume hood and Scanning Electron Microscope (SEM) are also available.