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Access Request Form

  1. Complete the online MNMS Cleanroom Access Request Form. Print the form, sign and obtain the signature of your Principle Investigator or Advisor.
  2. Complete the Online General safety Training, Hydrofluoric Acid Safety Training, and General Laser Safety Training offered by the University Division of Research Safety, (https://www.drs.illinois.edu/Training?section=GeneralLabSafety#GeneralLaboratorySafetyTraining). When the session is completed successfully, please print out the certificate that is generated. If you are an external user, please contact Joe Maduzia (jmaduzi2@illinois.edu) for information about a login and password for the on-line DRS safety course.
  3. Submit the following to Joe Maduzia, 221B MEB:
    • completed and signed access request form
    • the I-Card photocopy
    • DRS General Safety Training Certificate
    • Hydrofluoric Acid Safety Training Certificate
    • General Laser Safety Training Certificate

Upon signature, the User and Advisor hereby certifies that they will abide by the established policies and procedures of the MNMS facility, including that all chemicals brought into the MNMS facility must be approved in advance. If the User does not follow the established policies and procedures, their access to, and privileges in the MNMS facility may be revoked at the discretion of the Director.

All information required unless otherwise specified.

Personal Information
University ID#: NetID:
First Name: Last Name:
Home Phone:
Local Address: City:
State: Zip:
Office Information
Office (Building & #): Office Phone:
Advisor Information
Advisor's Name: Advisor's E-Mail:
Department: Advisor's Phone #:
Project Information
Start Date: Completion Date:
Project Name: Banner Acct #:
Area Access Request: (Select the room/s you will need access to)




System Access: (Select the system/s you will need. Note: Systems without room #’s are in 213 MEB)

Photolithography:





Etching:



Deposition:




Thermal Processing:





Other:






Mechanical:




Metrology: